思衛科技 Jetek Technology Corp.
CIS Testing Technology 思衛科技 Jemmy Mobil Phone:0917866007 E-mail:
[email protected]
思衛科技 Jetek Technology Corp.
Contents • • • • •
Basic Introduction CIS Function CIS Test Item CIS Test System Production Issue
思衛科技 Jetek Technology Corp.
Basic Introduction -What is CIS -CIS Application -CIS Market
思衛科技 Jetek Technology Corp.
What is CIS CIS(CMOS Image Sensor)
Digital camera CIS CCD CCD
思衛科技 Jetek Technology Corp.
CIS Application Note PC
PDA Mobile Phone
Wristwatch Camera
Digital Camera
In-vehicle Camera CCD / CMOS Image Sensor
Video Camera
Security Camera Fingerprint/Pupil User Authentication Facsimile/Scanner
Copy Machine
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CIS Market
思衛科技 Jetek Technology Corp.
CIS Market
思衛科技 Jetek Technology Corp.
CIS Function -System Block
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System Block CMOS Image Sensor
CDS ADC AGC
Video Encoder
NTSC/PAL
Interface
DVP (Digital Video Port)
DSP Timing Generator
Memory
MIPI (Mobile Industry Processor Interface)
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Image Sensor Structure
思衛科技 Jetek Technology Corp.
Passive Sensor: Advantage: Simple circuit(one transistor) Large sensor area Disadvantage: Loading is higher Random noise is big
Active Sensor: Advantage: Electron convert voltage directly in each pixel Reduce radon noise Disadvantage: Small sensor area Amplifier character is different in each pixel Fixed pattern noise
思衛科技 Jetek Technology Corp.
Digital Control Logic •Timing generator • I2C Interface Exposure control Frame Rate control Gain control Image size control Multi port output --------
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CDS CDS(Correlated Double Sampling) Vin
Delay T
+
_
Vout
思衛科技 Jetek Technology Corp.
About Multi Port Output :
Clk limit solution for big area sensor
思衛科技 Jetek Technology Corp.
EnCoder Monochrome: Sync
1 Hsync Color:
Chroma
Burst
1 Hsync
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DVP Waveform Diagram
FEN: VSync LEN: HSync
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MIPI Waveform Diagram
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Output Image:
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Output Signal(Internal ADC) :
Response
Pixels
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CIS Test Item • • • •
DC/Function Test ADC Test Image Test(Dark,Standard Light,Saturation,Color) Image Processor Library
思衛科技 Jetek Technology Corp.
CIS Test Item
DC
Test
ADC Test
• Continuity • Leakage • Power Consumption
Function • I2C Write/Read • DSP Pattern
Test
• • • • •
Offset Gain INL / DNL THD S/N
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Dark Test • Dark Mean/Std. • Dark Row/Column Variation • Dark uniformity DSNU(Dark Signal non-uniformity) • Dark Defect Pixel • Dark Cluster • Dark Current
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Dark Current
(Dark_level1-dark_level2)/(0.255-0.02) Dark_level1 : Exposure:255ms Dark_level2 : Exposure:20ms
Response 20
255
Exposure Time(ms)
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Defect Test • Defect Pixel Test • Adjacent Defect Pixel Test Wound Pixel
Dead Pixel
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Adjacent Defect(Cluster)
Region Define
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Cluster Test Algorithm • Build Convolution Filter • Build Bed Pixel Map • Cluster Judge Method
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Cluster Judge Method :
CMOS Imager
ΣXi N Frames
Bad Pixel Map
Convolution Filter
Mean X 1/N
Count
Judge
思衛科技 Jetek Technology Corp.
Build Bed Pixel Map : R Value
G Value
R Value
G Value
G Value
B Value
G Value
B Value
R Value
G Value
R Value
G Value
_
R Mean
G Mean
R Mean
G Mean
G Mean
B Mean
G Mean
B Mean
R Mean
G Mean
R Mean
G Mean
0
0
0
0
0
1
1
1
0
1
0
1
思衛科技 Jetek Technology Corp.
Judge Method 1: For 3 * 3: 0
0
0
0
0
0
1
1
1
0
0
1
0
1
0
0
0
0
0
0
0
0
0
0
0
*
1
16
2
416
460
352
64
256
128
274
211
273
8
32
4
16
3
16
You can judge the relation of bed pixels by value Ex: 1 1 1 274
思衛科技 Jetek Technology Corp.
Judge Method 2: For 3 * 3: 0
0
0
0
0
0
1
1
1
0
1
1
1
11
13
11
0
1
0
1
0
1
9
1
11
5
11
0
0
0
0
0
1
1
1
1
2
1
0
0
0
0
0
*
If the value >10 , There are 3 bad pixels in the 3*3 area (don’t care relation of bad pixels)
思衛科技 Jetek Technology Corp.
Standard Light Test • Mean Level ( Light, R, G, B ) • Std. ( Overall, R, G, B ) • S/N ( Overall, R, G, B ) -FPN(Fixed Pattern Noise) -Random Noise • Row/Column Variation (R, G, B ) • Uniformity (R, G, B ) PRNU(Photon Response non-uniformity) • Defect Pixel (Overall):Defect judge by R, G, B independently • Cluster Ps1: G1, G2 maybe need to be separated
思衛科技 Jetek Technology Corp.
Saturation Test • Saturation Mean Level (Overall, R, G, B ) • Dynamic range (R, G, B) 20 * log( V_sat / V_noise)
思衛科技 Jetek Technology Corp.
Color Frame Test • • • •
R (G, B)Mean Value in R(G, B) Light R (G, B)Std. in R(G, B) Light Prime Response in R(G, B) Light Cross Response in R(G, B) Light
思衛科技 Jetek Technology Corp.
Prime Response in R Light (Light R Mean – Dark R Mean) / (Light Overall Mean – Dark Overall Mean)
Cross Response in R Light ((Light G(B) Mean – Dark G(B) Mean) / (Light R Mean – Dark R Mean)
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Micro Lens
思衛科技 Jetek Technology Corp.
Micro-Lens On-chip Micro Lens
Color Filter Photo Shielding Film
Sensor Die
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Normalize Micro Lens Shift By low pass filter:
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Solution1 for Micro Lens Shift By HW(Pupil Lens)
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Solution2 for Micro Lens Shift By SW
Image Uniformize 1
1
1
1
1
1 1
1
1
1
1
1
1 1
1
1
1
1
1
1 1
1
1
1
10
1
1 1
1
1
1
1
1
1 1
1
1
1
1
1
1 1
1
1
1
1
1
1 1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
2
2
1
1
10
1
1
1
2
1
1
1
1
1
1
1
1
1
1
1
1
×
1
1
1
1
1
1
2
2
2
1
1
2
2
2
1
1
2
2
2
1
1
1
1
1
1
1
1
1
1
1
1
2
1
1
0.5
0.5
0.5
1
2
2
1
1
0.5
5
0.5
1
2
2
2
1
1
0.5
0.5
0.5
1
1
1
1
1
1
1
1
1
1
1/9
1/9
1/9
1/9
1/9
1/9
1/9
÷
1/9
÷1/9
思衛科技 Jetek Technology Corp.
CIS Test System • • • • • •
System Structure IP Module Illuminator(Light Source) Main System Analog Module(option) Debug Tool
思衛科技 Jetek Technology Corp.
System Structure Main System Control Signal
Sync
Control & Result
Sync
Data Bus
DUT
Light Source Prober / Handler
IP Module (Frame Grabber included) Data
Analog Waveform
Analog Module
Sync
思衛科技 Jetek Technology Corp.
Docking method: Light source connect with testhead directly
思衛科技 Jetek Technology Corp.
Docking with Prober (Cable system) Testhead AC Power
Cable system
Top View
illuminator
PIB (Prober Interface Board)
Prober
思衛科技 Jetek Technology Corp.
Docking with Handler (Cable system) Side View
Handler
DIB (Device Interface Board
Cable system
Testhead
illuminator
思衛科技 Jetek Technology Corp.
IP Module Test Head
IP Module Digital Image
5pins:
Timing Control & Setup
IP Cabinet IP Data I/F
32 pins max.
Frame Grabber Board
CRT & Keyboard
IP Controller
Tester Cabinet Digital Pins
DUT
DC Test Functions
DC Pins
Master Clocks
CRT & Keyboard
Digital Test Functions
LF/HF/VHF Pins Analog Test Functions
TC Time Measurement
Light Source Controller
UIP
思衛科技 Jetek Technology Corp.
Illuminator Light Source Structure AGC
思衛科技 Jetek Technology Corp.
Lamp AGC
思衛科技 Jetek Technology Corp.
Illuminator Specification •Multi Sites (CP: Depend on Illuminator Area Size FT: Depend on Illuminator multi sites Design)
•Area: Area Sensor >25*25 mm Line Sensor > 100*100 mm •LUX: W > 1000 LUX For Blue Light
•Uniformity: < 3%
思衛科技 Jetek Technology Corp.
•R/G/B/W Light (option) •Pattern Turret (option) •Shutter Turret
•F-number •Calibration Table •External / Internal Type
思衛科技 Jetek Technology Corp.
Light Source Uniformity Measure Method : Uniformity (+/- %) =
(Lx max - Lx min) ((Lx max + Lx min)/2)
*100 / 2
思衛科技 Jetek Technology Corp.
Light Source F-number :
F-Number=Focal Length / Iris Diameter
思衛科技 Jetek Technology Corp.
Select Illuminator: Uniformity
Halogen
>
LED
Spectrum
Halogen
>
LED
Intensity
Halogen
>
LED
Lamp Life Time
Halogen
<
LED
Cost
Halogen
>
LED
Color Temperature
Halogen
=
LED
思衛科技 Jetek Technology Corp.
思衛科技 Jetek Technology Corp.
Compare External type Illuminator and Internal type Illuminator •External type Illuminator(Cable Mount) Advantage: Mount handler/prober Easily Disadvantage: -Long cable effect test speed limitation -Need special handler/prober design •Internal type Illuminator(Direct Mount) Advantage: -Signal performance is better -Use Standard handler/prober
思衛科技 Jetek Technology Corp.
Main System / Analog Module Dual Master Clocks
Digital Master Sequencer
Test Vector Generator
Pin Electronics
Digital
Synchro-Pipe
Capture Digital Memory
AWG Sequencer
Wavefor m Source Memory
Digitizer Sequencer
Wavefor m Capture Memory
DC Sequencer
Data DC Memory
TI Data A Memory
Time Measurement Unit
AW G
Digitizer
Waveform Source Waveform Digitizer
DC Time Interval Analyzer
Time Measure
思衛科技 Jetek Technology Corp.
Main System Specification •DPS •Digital I/O (Image data out not included) pin count : > 64 pins data rate : > 30MHz pattern depth : >2M •Image Data Differential Transfer •System Noise Floor : < -90dB •Prober/Handler Control •Illuminator (Light source) Control
思衛科技 Jetek Technology Corp.
Analog Module • Digitizer sample rate: > 40MHz resolution: >12Bits • AWG sample rate: >40MHz resolution >12Bits
思衛科技 Jetek Technology Corp.
Debug Tool IP Image Viewer • Display Image • View Pixel Value and Color • Change Display Scale of image • Displaying Line Profile • Histogram
思衛科技 Jetek Technology Corp.
思衛科技 Jetek Technology Corp.
Production Issue • Socket • Light Source • Multi Sites
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Socket Pogo Pin
Socket Cover Socket PCB DUT
Tester Load Board
Socket Sensor Glass
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Light Source Light Source Correction(Use same type light Source) • Adjust the light source focus • Calibration Light Source
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Adjust Light Source Focus • Support a small hole light source • Let’s the hole imagine put on the center of frame • Adjust the light source focus • Convert iris
思衛科技 Jetek Technology Corp.
If the Slope is Sharp, The focus adjustment is good.
思衛科技 Jetek Technology Corp.
Use different Light Source Spectrum is the most important concern - light Source: Halogen or LED - Color Temperature (Color Temperature ,Blue Response
- Filter
)
思衛科技 Jetek Technology Corp.
F-number is the other concern
思衛科技 Jetek Technology Corp.
Multi Sites For wafer: Assign needle location